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Rhosonics Paper Presentation ICPT 2024
Inline real-time process monitoring of CMP slurries with ultrasonic and conductivity measurements
Photo · Rhosonics
From October 16 to 18 2024, our colleagues Raymond Maas and Ebru Arslan attended ICPT 2024 in Wiesbaden, Germany, where they presented our latest research paper authored by Raymond Maas: Inline Real-Time Process Monitoring of CMP Slurries Using Ultrasonic and Conductivity Measurements.
Our innovative solution allows for precise control and real-time monitoring of CMP slurries, ensuring exceptional accuracy, adaptability, and sustainability in semiconductor manufacturing. With a focus on efficiency and resource optimization, we are proud to demonstrate how our technology meets the growing demands of the industry.
Below is the poster that Raymond and Ebru presented at ICPT 2024.
Inline real-time process monitoring of CMP slurries with ultrasonic and conductivity measurements
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